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Passivation:

Superior Sidewall Protection for
Next-Gen µLEDs, VCSELs, Nanowires, and Photodetectors

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Devices such as microLEDs, VCSELs, and photodetectors consist of multilayer stacks of different compound semiconductor materials, processed to form so-called mesa structures. When the sidewalls and surfaces of these mesa structures are exposed to oxygen, native oxides begin to form, prompting the creation of defects that act as non-radiative recombination centers.

 

These defects serve as pathways for considerable leakage currents and have a significant impact on, for instance, the photodetector performance (sensitivity, signal-to-noise ratio, dark-current). As the size of optoelectronic devices decreases, surface recombination becomes an increasingly significant factor. 

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Kontrox   eliminates the majority of surface defects on mesa sidewalls, resulting in a substantial improvement in device performance and power efficiency.

Application case: microLED

The display industry is coming to a major turning-point due to high demand and unprecedented requirements of power efficiency and brightness driven by next-generation information displays, automotive, VR/AR, and IoT applications.  MicroLED technology is currently the only way for that transformation.

 

There are numerous obstacles in realizing a good quality, high yield, mass-production-ready micro-LED display. Poor efficiency at low current densities and variation of emission level between chips is one of the key issues that is directly related to the quality of the sidewalls of the chips and the high surface recombination effects. These effects become more prominent as the chip size gets smaller.

Kontrox forms a high-quality passivation layer with substantially reduced defect densities improving the microLED's power efficiency & brightness levels significantly.

Kontrox   200mm Wafer Pilot Line: Advanced Cluster Passivation Tool
 

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The Kontrox 200mm Wafer Pilot Line is a powerful tool for optimizing passivation processes, specifically for mesa sidewalls in devices like microLEDs, VCSELs, and nanowires.

By integrating Kontrox passivation with plasma-enhanced ALD in a cleanroom environment, the Pilot Line minimizes surface defects on mesa structures, addressing critical issues such as non-radiative recombination and leakage currents. This results in significantly enhanced device performance, power efficiency, and reliability.

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Contact us to explore how our Pilot Line can streamline your mesa sidewall passivation process and support your optoelectronic applications.

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